Probe Stations

300 mm Probe System

RFI Shielding

300mm Probe Station

300mm Probe Station

300mm Wafer Probe

300mm Wafer Probing

300 mm Wafer Prober

300mm Wafer Probe Systems

300mm Manual Probe Station

EMI Shielded Probing System

300mm RFI Shielded Probe Station

MPI TS300-SE Probe System

MPI TS300-SE - 300 mm Manual Probe System with ShielDEnvironment™

The MPI TS300-ShielDEnvironment™ (TS300-SE) is designed to ensure advanced EMI/RFI/light-tight shielding, ultra-low noise, low leakage measurement capabilities on 300 mm wafer in a temperature range from -60 to +300°C.

In addition, it can be configured with light curtain safety system as TS300-HP for dedicated High-Power measurements up to 10 kV / 600 A or with MPI IceFreeEnvironment™ to become a probe station for Design Validation (Product Engineering) supporting long customized probe cards up 15” length and probing with MicroPositioners (active impedance probes) simultaneously.

It’s incorporated with vibration isolation table at optimal height to make the daily operation very convenient.

Features & Benefits

ShielDEnvironment™

MPI ShielDEnvironment™ is a high performance local environmental chamber providing excellent EMI- and light-tight shielded test environment for ultra-low noise, low capacitance measurements.

ShielDCap™

A fully configurable part of the MPI ShielDEnvironment™ which allows up to 4-port RF or up to 8-ports DC/Kelvin or a combination of those configurations.

Easy to reconfigure with convenient shielding that is MPI ShielDCap™ – a lot of little things which make the difference in simplifying day by day operations.

MPI ShielDCap™

Air-Bearing Stage

The TS300-SE has a unique stage concept combining MPI air-bearing stage design, with simple one handed puck control, provides incredibly convenient operation for fast XY navigation and quick wafer loading with the accurate and fine positioning capability in addition over the entire travel range. Please check the unique Z chuck control in addition.

MPI TS300-SE - Air Bearing Stage

Unique Platen Lift
with Probe Hover Control™

The repeatable (1 μm) platen lift design has three discrete positions for contact, separation (300 μm), and loading (3 mm). The lift includes a safety lock rotation utility which prevents accidental platform descent. These features offer unparalleled functionality and are standard offerings for the MPI TS300-SE manual probe system. Prevention of unexpected probe or wafer damage is critical to system design and provides intuitive control, accurate contact positioning, safe set-ups, and easy step and repeat functionality.

Additional Probe Hover Control™ comes with hover height (50, 100 or 150 μm) for easy and convenient probe to pad alignment.

Unique Chuck Z Adjustment

TS300-SE incorporates in addition to the air bearing XY stage – 5 mm Z chuck adjustment in µm resolution for fine and accurate contact / over-travel control or probe cards drop tip correction.

A 1 mm scale indicator provides easy feedback to the operator. 20 mm pneumatic lift in addition offers easy and continent  loading / unloading procedure.

MPI TS300-SE - Chuck Z Control

Various Chuck Options

The TS300-SE is available with various chuck options to meet different budgets and application requirements.

Together MPI and ERS designed the New 300 mm Thermal Chuck AirCool® PRIME Technology family, offering unsurpassed thermal flexibility with reduced soaking time by 60%, and the largest variety of thermal ranges on market.

Reduced transition time, improved electrical performance, easier testing under inert-gas atmosphere, and field upgradability are additional values of the AirCool® PRIME thermal chuck systems.

The Ambient Chucks are available in the following versions: Coaxial, Triaxial or RF with two auxiliary ceramic chucks for accurate stable RF calibration.

MPI TS300-SE - Chucks

Thermal Control Integration

The wafer loading door is  locked at any temperature below 15°C – this unique feature makes the TS300-SE the safest manual probe station in the market.

Furthermore, the thermal chuck can be operated via the fully integrated touchscreen display, ergonomically mounted in a convenient location on the prober for fast adjustment and immediate feedback.

MPI TS300-SE - Integrated Thermal Chuck Controller Panel

ERS Patented AC3 Cooling Technology Incorporated

These chucks incorporate the ERS patented AC3 cooling technology and its air management system to purge the MPI ShielDEnvironment™ directly from “already used” air – reducing dry air consumption up to 30 to 50% as compared to other systems on the market.

ERS Patented AC3 Cooling Technology

Various Optic Options

MPI Optics are available with a choice between a single tube MPI SuperZoom™ SZ10, the MegaZoom™ MZ12 with up to 12x optical zoom and more than 42 mm working distance or EyeZoom™  EZ10 – the 10x optical zoom optic with ergonomic 20x eyepieces, 90 mm working distance and down to 2 µm optical resolving power.

Unique Upgrade Path

The modular design of the TS300-SE modular creates a unique upgrade path. All TS300-SE probing accessories, such as thermal chucks, microscope and positioners, can be upgraded or reconfigured to variety of application requirements covering tool lifespan for increasingly low cost of ownership.

The MPI TS300-SE probe systems with ShielDEnvironment™ provides maximum EMI shielding and allows for low noise device on-wafer measurements for wide verity of applications such as Device Characterization and Modeling, RF/Microwave, Wafer Level Reliability, Failure Analysis, Design Validation, and High Power.

Field Application Engineer

Job Location: San Jose, CA

Job Duties:

  • Assist in developing HW and SW measurement methodologies/solutions for analytical wafer probe solutions with signal applications from DC to millimeter wave frequencies as well as Silicon Photonics (SiPH);
  • Collaborate with customers on their measurement challenges, and provide applications specific product training;
  • Provide pre- and post-sale support to AST, customers, service department, and the sales channel developing HW and SW measurement solutions for analytical wafer probe stations;
  • Define application-specific solutions based on customer-provided device data and facilitate both customer and divisional teams to successful results;
  • Perform product training seminars for customer and sales channels as well as participate in trade shows and technical seminars;
  • Make recommendations regarding product improvement, new products, and quality enhancement;
  • Author, document, publish, and present measurement solutions via Seminars, Applications Notes, Briefs, and White Papers;
  • Prepare, plan, and assist with customer product demonstrations that highlight value-based differentiation of AST product offerings;
  • Develop unique and individual customer presentations designed to professionally position the MPI brand in the North American market and deliver formal presentations to customers.

Job Requirements:

Master’s degree in Electrical Eng., Electronics Eng., Physics, or Photonics; Must possess 6 months of relevant work experience; Travel to customers’ sites in US and headquarters in Taiwan is required.

Send resume to: MPI America, Inc., 2360 Qume Drive, Suite C, San Jose, CA 95131, Attn: Janet Chiang