200 mm Probe Station | Probe Stations |  Manual Probe Stations | Wafer Test | RF Probe Stations |  Probe Stations | Wafer Probe Station 

200 mm Probe Station | Wafer Probe Testing

Manual Probe Stations | RF Probe Station

Manual Probe Station |  Manual Probe Stations

MPI TS150, TS200 & TS300

MPI TS150, TS200 & TS300

TS150 TS200 TS300 Optic Tilting
TS150 TS200 TS300 Optic Ttilting
TS150 TS200 TS300 Optic Ttilting
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MPI TS150, TS200 & TS300 each incorporate many exciting features which make daily operation much simpler.  The features are easy, intuitive, convenient and ensure highly accurate measurements.

Features & Benefits

MPI TS150, TS200, TS300 Probe systems - The Unique Air Bearing Stage

Air-Bearing Stage

The MPI unique air-bearing stage design, with simple single-handed puck control, provides unsurpassed convenience of operation for fast XY navigation and quick wafer loading without compromising accurate and fine positioning capability with the additional fine and accurate 25x25mm XY-Theta micrometer movement.

TS150 TS200 TS300 Optic Tilting
TS150 TS200 TS300 Optic Ttilting
TS150 TS200 TS300 Optic Ttilting
TS150 TS200 TS300 Optic Ttilting
TS150 TS200 TS300 Optic Ttilting
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Unique Platen Lift
with Probe Hover Control™

Measurement accuracy depends on the contact quality first! The highly repeatable (1µm) platen lift design with three discrete positions for contact, separation (300µm), and loading (3mm) with a safety lock utility are all examples of unparalleled functionality incorporated into MPI manual probe systems. These features prevent unexpected probe or wafer damage while providing intuitive control and accurate contact positioning. This capability is especially critical in both high frequency and high power applications in order to achieve the most accurate measurement results.

For TS200 and TS300, additional Probe Hover Control™ comes with hover heights (50, 100 or 150 µm) for easy and convenient probe to pad alignment.

MPI TS150, TS200, TS300 - Platen Height Adjustment Scale

Height Adjustment Scale

The probe platen has 25 mm of fine height adjustment required to support various applications. The unique 1mm accurate scale gives direct feedback about the current position.

MPI TS150, TS200, TS300 - Compact Platen

Compact and Rigid Platen Design

The compact and rigid platen design accommodates up to ten DC or four RF MicroPositioners for various application requirements.

MPI TS150, TS200, TS300 Probe Systems with Integrated Thermal Chuck Controller Panel

Various Chuck Options

The manual systems are available with various chuck options to meet different budgets and application requirements. Chuck options include MPI’s coaxial or triaxial Chucks or various ERS thermal chucks to support temperature measurement up to 300 °C – as example for seamless integration of the thermal touch controller for quick and convenient access and operation.

TS150 TS200 TS300 Auxiliary Wafer Chucks

Auxiliary Chucks

The RF chucks include two auxiliary chucks built in ceramic material for accurate RF calibration.

MPI Microscope Movement

Various Optic and Movement Choices

A wide range of Optics is available with a choice between stereo for all common DC/CV applications or single tube high magnification microscopes for RF or load-pull configurations.

TS150 TS200 TS300 Optic Tilting
TS150 TS200 TS300 Optic Ttilting
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Optic Tilting

90 degree tilting as a standard feature or even pneumatically driven, linear Z lift offers very convenient set-up and easy probe tips replacement.

MPI TS150 Manual Probe System - Vibration Isolation Platform

Vibration Isolation Platform

All manual systems includes vibration absorbing base to achieve stable and reliable long-term probe to pad contact which ensures reliable measurement results. Vibration isolation platform or table are optional available where the laboratory environment requires extensive vibration protection.

MPI Dark Box Option for MPI Manual Probe Stations

Dark Box

The available Dark Box options provides an EMI-shielded and light-tight test environment for ultra-low noise DC measurements.

MPI TS150, TS200 & TS300 are open, easy to use and cost effective manual probe systems designed for precision analysis of substrates and wafers up to 150, 200 and 300mm. These systems address a wide variety of applications such as Failure AnalysiDesign Validation/IC Engineering, Wafer Level Reliability, MEMS, High Power and Device Characterization and Modeling.

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