Wafer Level MEMS Test

Device Characterization Process | EMI-shielded Test Environment | Automated Test Equipment

MPI Definition

Micro Electro Mechanical Systems are chips that combine electrical and mechanical properties. These devices are used in our daily lives in a variety of ways. The constant demand for miniaturization, lightweight and cost effective solutions is driving the development of MEMS into multiple technical fields. In many cases, this technology is used for sensing a mechanical stimulus and converts it into electrical signals. The reverse transformation is done by applying an electrical signal to force a mechanical motion.

Major Requirement

A completely stable environment is essential for testing MEMS on wafer level. Integration of additional optical measurement equipment is required to analyze the motion of the stimulated mechanical part of the MEMS. This can be dynamic in-plane and out-of-plane movements, but also very detailed topography measurements. For automated testing of entire wafers, this motion analysis system needs to work together with the alignment optics of the probe station. Testing MEMS at elevated temperatures is part of many test scenarios, but it is challenging because heat waves affecting optical measurements.

MPI Solutions

MPI probe stations are designed for highly stable on-wafer testing and feature a vibration-isolated platform that minimizes introduced ground vibrations. The TS2000-IFE has been developed specifically for this type of demanding test requirement. To design the ideal integration of optical metrology, MPI has teamed up with a major supplier of such instrumentation. The result is an extremely stable microscope bridge that can be moved between a high-resolution microscope, such as the MPI iMAG® digital microscope series, and the MEMS analysis optics. Temperature testing is made possible by using a thermal shield, which blocks radiation and supports interference-free measurements.

Suitable MEMS test probe stations are also available in a manual version.

Field Application Engineer

Job Location: San Jose, CA

Job Duties:

  • Assist in developing HW and SW measurement methodologies/solutions for analytical wafer probe solutions with signal applications from DC to millimeter wave frequencies as well as Silicon Photonics (SiPH);
  • Collaborate with customers on their measurement challenges, and provide applications specific product training;
  • Provide pre- and post-sale support to AST, customers, service department, and the sales channel developing HW and SW measurement solutions for analytical wafer probe stations;
  • Define application-specific solutions based on customer-provided device data and facilitate both customer and divisional teams to successful results;
  • Perform product training seminars for customer and sales channels as well as participate in trade shows and technical seminars;
  • Make recommendations regarding product improvement, new products, and quality enhancement;
  • Author, document, publish, and present measurement solutions via Seminars, Applications Notes, Briefs, and White Papers;
  • Prepare, plan, and assist with customer product demonstrations that highlight value-based differentiation of AST product offerings;
  • Develop unique and individual customer presentations designed to professionally position the MPI brand in the North American market and deliver formal presentations to customers.

Job Requirements:

Master’s degree in Electrical Eng., Electronics Eng., Physics, or Photonics; Must possess 6 months of relevant work experience; Travel to customers’ sites in US and headquarters in Taiwan is required.

Send resume to: MPI America, Inc., 2360 Qume Drive, Suite C, San Jose, CA 95131, Attn: Janet Chiang