Semiconductor Wafer Carrier

Probe Station | Probe Systems | 300mm Probe Stations | 300mm Probe Station | 300mm Wafer Probe | Wafer Probe Stations300 mm Wafer Probing | Manual Probe Station

Probe Station | Probe Systems

Wafer Test | 200mm Probe Station

Wafer Test | Manual Probe System

Probe Station

Wafer Carrier

Probe Systems

Wafer Swapping

300mm Automatic Wafer Carrier

300 mm Wafer Prober

Probe Station Wafer Carrier

Automated Probe Test

Fully Automatic Wafer Probe Systems

300mm Automated Probe Station

300mm Wafer Swapping

300mm Wafer Carrier

TS3500 Series with WaferWallet® = Accuracy + Flexibility + Automation

MPI TS3500-SE - 300 mm Automated Probe System with ShielDEnvironment™

TS3500 and TS3500-SE are equivalent in features to MPI’s well-known and established TS3000 and TS3000-SE 300 mm probe stations with the added fully-automated capability by configuring or upgrading with MPI’s unique WaferWallet® or WaferWallet®MAX. MPI’s solution is lowering the customer’s overall cost-of-test by providing full automation for less than other vendor’s semi-automated products.

It incorporates MPI advanced technologies, such as PHC™, as a standard feature, and mDrive™ and/or VCE™ optional or as an upgrade in the field.

TS3500-SE Fact Sheet

TS3500-SE & Celadon Indexer™
Fact Sheet

TS3500-SE Data Sheet

TS3500 Data Sheet

Features & Benefits

The WaferWallet®

Common practice for Device Characterization in the Modeling and New Technology Development processes is to extract data from a typical few wafers via extremely accurate IV-CV, 1/f, RF, mmW, and Load-pull measurements.

MPI’s WaferWallet® extends the TS3500 series automation without compromising measurement capability. The WaferWallet® is designed with five individual trays for manual, ergonomic loading of 150, 200, or 300 mm “modeling” wafers. Fully-automated tests with up to five identical wafers at different temperatures are now possible.

The WaferWallet® MAX

MPI’s WaferWallet® MAX is easy field upgradable to address the demand for faster time to market, collecting data from multiple 150 or 200 or 300 mm SEMI standard cassette.

Including advanced alignment technologies for pre-aligner and cassette scanner, optional top or bottom Wafer ID Reader and fully automatic exposure control, the WaferWallet® MAX is also available as an option for fully-automated measurements.

Hot and Cold Wafer’s Swapping

Returning the chuck to ambient is no longer required during the wafer loading and unloading process. With the WaferWallet®, MPI provides valuable time savings via a unique capability of load/unloading wafers while the chuck remains at any test temperature.

Celadon’s Indexer™

The patented Indexer™ from Celadon is the industry’s first automatic, up to 5 probe cards changer. The combination with WaferWallet® (up to 5 wafers) or WaferWallet® MAX (up to 25 wafers) offers unsurpassed flexibility and automation for advanced device modeling and wafer level reliability measurements.

Can support up to five VC20™’s with Advanced Cantilever™ technology, at any variety and configuration
Card changes are complete in seconds
Fully programmable and SENTIO® integrated
Compatible to off-axis Probe-To-Pad-Alignment (PTPA) on TS3500 Series
Tested for hundreds of thousands of touchdowns

TS3500-SE with WaferWallet® & Celadon’s Indexer™

Test Automation

Simple and cost-effective manual in-tray wafer alignment via notch indicator makes initial wafer loading fast and reliable. Dependent upon operational methodology, other options include wafer Pre-aligner, ID reader or PTPA capability on the TS3500-SE are additional features increasing levels of automation.

SENTIO® Dashboard

MPI’s SENTIO® 3.0 Software Suite with advanced GUI design is based on the revolutionary patented technologies:

Multi-touch, intuitive operation
Single window GUI, like common mobile devices
Dashboard view of the system status for simplified navigation
Intelligent, predictable operational guidance
Free upgrades for the life of the probe station

With a simple view of the WaferWallet®Dashboard, the operator can recognize the loaded or empty trays, wafer diameter
(150 or 200 or 300 mm), flat/notch orientation, wafer ID (if applicable), percentage of WaferMap tested and much more.

MPI Prober Control Software Suite SENTIO®

Contact Us

Probe Card