300mm Probe Stations
Automated Probe Station
Silicon Photonics Probe Station
Semi Automatic Wafer Prober
300mm Automated Probe Systems
300 mm Vacuum Probe Station
300mm Semi-Automated Probe Systems
Wafer Probing System
300 mm Semi Automatic Wafer Prober
MPI TS3000 Automated Probe System
- Maximum on temperature range -60…300°C
- Maximum on flexibility
- Minimum cable distance to functional testers with a design specific cable interface for better measurement directivity
- Minimum platen-to-chuck height for optimal mmW & internal node probing
- Minimum system footprint by integrating the thermal system’s chiller “inside”
which combined together make the TS3000 probe station unique to MPI Corporation and to the product engineering market.
Features & Benefits
Incorporating MPI’s IceFreeEnvironment™ the TS3000 accommodates testing with MicroPositioners and / or probe cards over a wide temperature range of -60…300°C on up to 300 mm wafers with additional capability for probing on film-frames.
Probe Hover Control™
MPI Probe Hover Control PHC™ allows easy manual control of probe contact and separation to wafer. Separation distance can accurately control with micrometer feedback for probe to wafer/pad positioning. Ease of use guarantees the safest operation by minimizing error during critical set-up and probe change operations.
Large Probe Platen
TS3000 provides large, easily accessible probe platen in order to accommodate up to 12x DC or 4x RF MicroPositioners with minimum of platen-to-chuck height.
Integration of Load-Pull Tuners or larger area MicroPositioners makes TS3000 system an idea choice for RF and mmW measurements.
The probe platen is actively cooled to avoid thermal drift especially at 300°C.
Easy Wafer Loading
The dual front door access and the unique chuck design allows easy loading / unloading procedure for 150, 200, 300 mm wafers, wafer fragments or even small down to 5×5 mm ICs.
AUX chucks are both located in front where can be loaded / unloaded very conveniently. No roll-out stage allows for a simple method of automation for RF calibration and probe card cleaning.
Integrated Hardware Control Panel
The intelligent hardware control panel is completely integrated into the probe system and is designed based on decades of experience and customer interactions to provide faster, safer and convenient system control and test operation. The keyboard and mouse are strategically located to control the software if necessary and will also control the Windows
Thermal Chuck Integration
Due to smart chiller integration, the TS3000 series provide optimized footprint for saving the valuable space in the Lab.
Together MPI and ERS designed the AirCool
Reduced transition time, improved electrical performance, easier testing under inert-gas atmosphere, and field upgradability are additional values of the AirCool
The thermal systems can be operated by using the fully integrated touchscreen display, placed at convenient location in front of the operator for fast operation and immediate feedback.
ERS Patented AC3 Cooling Technology Incorporated
These chucks incorporate the patented AC3 cooling technology and self-management system to purge the MPI ShielDEnvironment™ using recycled cooling air, thus drastically reducing air consumption 30% to 50% as compared to other systems on the market.
Probe Cards & MicroPositioners – Simultaneously
Single probes, low-profile probe card holder for 4.5” x 11” probe cards, and lower plate to chuck distance are ideal for simultaneous probing with passive / active high impedance probes, especially at negative temperatures; making the system a perfect choice for Design Validation and / or Failure Analysis work.
Safety Test Management™ (STM) System
Unique STM system prevents opening of the doors during testing – your measurement results are safe. Accidental opening of any system door during a negative chuck temperature is not possible on any event. Furthermore an intelligent dew point control routine avoids acumination during cold testing. The system automatically monitors the flow of CDA or Nitrogen. If the flow is interrupt or insufficient the STM™ turns the chuck automatically into a safe mode – heat the chuck as fast as possible to above dew point. MPI STM™ is the feature that makes measurements with TS3000 safer, more reliable and convenient by automatically maintaining a safe test environment.
The optional instrument shelf reduces cable lengths and increases measurement dynamic and directivity at RF and mmW applications.
Software Suite SENTIO
MPI automated engineering probe systems are controlled by a unique and revolutionary, multi-touch operation SENTIO
For RF applications, there is no need to switch to another software platform – the MPI RF calibration software program QAlibria