Wafer Probing Station |  200 mm Wafer Prober |  Probe Station | Manual Probe Station |  200 mm Wafer Prober | High Power Manual Probe Systems  

High Power Manual Probe Systems |  200 mm Wafer Prober

300 mm Probe Station | Wafer Test

High Power Probe Station |  200 mm Wafer Prober  

MPI High Power Probe Systems

10 kV – 600 A

MPI High-Power device characterization systems are specifically designed for on-wafer high power device testing. These systems support up to 3 kV triaxial / 10 kV coaxial and 600 A (pulsed) accurate measurements while providing a low-noise, fully shielded test environment.

High Power Probe System Solutions

MPI high power probing solutions offer variety of probing systems which include manual to automated versions to provide solution for different budgets and specific requirements.


Manual high power systems provides flexibility and lower cost solution for research institutes, universities, and foundries that need complex and accurate device characterization but not require to do high volume measurements. These systems are designed to connect with advanced high power measurement instruments to support advanced research works, without compromising the usability, safety and the measurement accuracy up to 3 kV (triax) / 10 kV (coax) and 600 A (pulsed).


MPI automated high power systems provide automated high through-put measurements by programming step-and-repeat functionality through MPI SENTIO® prober control software.


TS2000-DP is designed for open and flexible measurement set up with supporting over temperature measurement up to 300°C. Its open platen design make it possible to upgrade system for voltage higher than 10 kV, in the future and hence provide value for your investment.


TS2000-HP comes with MPI ShielDEnvironment™, providing wide temperature range from negative temperature as low as -60°C to higher temperature of 300°C. It is base on MPI’s TS2000-SE system and thus offers higher functionality to increase throughput; such as automatic side wafer loading, hot temperature wafer swap capability and low-noise nature of the shielded system.




High Voltage, High Current and Ultra High Power Probes

MPI high power probing solutions include dedicated high voltage, and high current probes which use MPI propriety multi-contact tips for reduced contact resistance. MPI’s high voltage probes are capable of low leakage current measurements during high voltage tests up to 3 kV triaxial or 5 kV & 10 kV coaxial set-ups. In addition, MPI Ultra-High-Power probes provides solution for on wafer measurement of ultra-high power devices up to 10kV/600A.

TS150 TS200 TS300 Optic Tilting
TS150 TS200 TS300 Optic Ttilting
TS150 TS200 TS300 Optic Ttilting
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Proprietary Triaxial Chuck Connection

MPI’s proprietary triaxial connector offers very easy reconfiguration between, ultra-low noise 3kV triaxial and 10kV coaxial set-ups without any changes to the chuck connection.

TS2000 Large Probe Platen

High Power Chucks

The MPI ambient or ERS AirCool® thermal Chucks supports wide-range of temperature from -60°C to 300°C are manufactured with low contact resistance and gold plated chuck tops. The chucks are fully integrated assemblies and are capable of holding wafers as thin as 70 µm. Users can configured high power chucks to support Taiko wafer types.

Safety Requirement

Regulatory approved  MPI high power systems are configured with a safety interlock enabled dark box or an infrared laser light curtain design to provide a safe testing environment.

MPI High Power Selection Guide

Manual 150 & 200 mm
Automated 150 & 200 mm
Ambient and Thermal Chucks
3kV Triax &
10kV Coax
3kV Triax &
10kV Coax
3kV Triax &
10kV Coax
3kV Triax &
10kV Coax
Thermal Range
Current Range
Max. 600A (pulsed)
TAIKO Wafer Support
Safety Protection & Interlock
Light Curtain
Anti-Arcing Probe Card
Anti-Arcing LiquidTray™
Wafer Loader

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