Probe System

200mm Probe Station

THZ Wafer Prober

200mm Probe Station

200mm Manual Probe Station

200 mm Wafer Prober

150mm Wafer Probing 

Wafer Probe Testing

200mm Wafer Probe Systems

200mm Manual Probe Station

200mm THZ Probing System

200mm THZ Wafer Probing

MPI TS150-AIT & TS200-THZ Probe Systems

MPI TS200-THZ - 200 mm Manual Probe System for mmW & THz Measurements

TS150-AIT and TS200-THZ probe systems expand MPI one-of-a-kind system solutions for emerging THz applications such as high-speed 5G communication, satellites, non-invasive spectroscopy, security and surveillance, medical and health care equipment, and short range automotive radar by adding active impedance tuner integrations on the same probe stations. These two systems are the industry’s first explicitly designed 150 mm and 200 mm probe systems providing accurate tests for the combination of requirements for mm-wave, THz, and automated impedance tuner applications with best possible measurement directivity.

  • Seamless integration of any banded, differential or broadband frequency extenders up to 1.5 THz and/or automated impedance tuners
  • Novel design of extenders/tuners integration for maximum of measurement dynamic
  • Maximum on mechanical stability and repeatability combined with convenient and safety operation

Features & Benefits

Air-Bearing Stage

The MPI unique air-bearing stage design, with simple single-handed puck control, provides unsurpassed convenience of operation for fast XY navigation and quick wafer loading without compromising accurate and fine positioning capability with the additional fine and accurate 25×25 mm XY-Theta micrometer movement.

MPI TS200-THZ - Air Bearing Stage with Optional Fine-Adjustment Micrometers

Unique Platen Lift
with Probe Hover Control™

The highly repeatable (1 µm) platen lift design with three discrete positions for contact, separation (300 µm), and loading (3 mm) with a safety lock utility are all examples of unparalleled functionality incorporated into MPI TS200-THZ manual probe system. These features prevent unexpected probe or wafer damage while providing intuitive control, accurate contact positioning, and safety set-up. This capability is especially critical if probes in mmW and sub-THz range are so cost intensive.

Additional Probe Hover Control™ comes with hover heights (50, 100 or 150 µm) for easy and convenient probe to pad alignment.

Chuck Z Adjustment

TS150-THZ has 10mm fine chuck Z adjustment, designed to be flexible in the integration of different frequency extenders, like from Rohde & Schwarz, VDI or OML. Extremely beneficial for set-ups using several bended solutions on the same probe system – for easy and fast reset-up.

MPI TS200-THZ - Standard 10 mm Fine Z Adjustment and Optional XY-Theta Micrometer Movements

Various MicroPositioners

The dedicated and extremely rigid probe platen design accommodates two bold->down MP80 large area MicroPositioners in east-west configuration. Four port RF measurements or DC biasing is easy possible by having two North and South “bridges” as a standard configuration.

MPI TS200-THZ - North and South Platen Bridges

MP80-DX

Another MPI pioneering solution on the market – the unique MP80-DX with easy and precise definition down to 1µm of Δl – is the ideal choice for accurate and cost-effective multiline TRL – the only RF calibration method in the mmW and sub-THz range. For more details, visit MPI QAlibria® software.

Various Chuck Options

The TS200-THZ is available with various chuck options to meet different budgets and application requirements such as MPI’s:

  • Standard RF Chuck with BNC connector,
  • Dedicated mmW Chuck, completely build in special ceramic with high thermal conductivity (>180 W/Km), or even
  • ERS AirCool RF Chuck (from 20°C to 200°C, or higher) with integrated Gold plated top surface with small vacuum holes

All chucks having two auxiliary chucks built in ceramic material for accurate RF calibration, especially in the range above 40 GHz.

Various Optic Options

A dedicated MPI Optics are available with a choice between a single tube MPI SuperZoom SZ10 or the MegaZoom MZ12 with up to 12x optical zoom and more than 45 mm working distance. The small factor of such microscopes is ideal for RF and mmW applications due to space restrictions inherent with the integration of frequency extenders requiring shortest distance to DUT.

MPI MZ12 Single Tube Microscope with 5MP Camera

Frequency Extenders Integrations

The TS200-THZ incorporates completely new design of frequency extender’s integration. In order to minimize the distance to the DUT, and to provide best possible measurement directivity, MPI introduced a novel concept which hovers the extender over the entire 200 mm wafer. Easy, convenient and fast reconfiguration is additional key feature of the new TS200-THZ probe station.

Field Application Engineer

Job Location: San Jose, CA

Job Duties:

  • Assist in developing HW and SW measurement methodologies/solutions for analytical wafer probe solutions with signal applications from DC to millimeter wave frequencies as well as Silicon Photonics (SiPH);
  • Collaborate with customers on their measurement challenges, and provide applications specific product training;
  • Provide pre- and post-sale support to AST, customers, service department, and the sales channel developing HW and SW measurement solutions for analytical wafer probe stations;
  • Define application-specific solutions based on customer-provided device data and facilitate both customer and divisional teams to successful results;
  • Perform product training seminars for customer and sales channels as well as participate in trade shows and technical seminars;
  • Make recommendations regarding product improvement, new products, and quality enhancement;
  • Author, document, publish, and present measurement solutions via Seminars, Applications Notes, Briefs, and White Papers;
  • Prepare, plan, and assist with customer product demonstrations that highlight value-based differentiation of AST product offerings;
  • Develop unique and individual customer presentations designed to professionally position the MPI brand in the North American market and deliver formal presentations to customers.

Job Requirements:

Master’s degree in Electrical Eng., Electronics Eng., Physics, or Photonics; Must possess 6 months of relevant work experience; Travel to customers’ sites in US and headquarters in Taiwan is required.

Send resume to: MPI America, Inc., 2360 Qume Drive, Suite C, San Jose, CA 95131, Attn: Janet Chiang