EMI/RFI/light-tight shielding​ Probe System

Shielded Probe System

RFI Shielding 

200mm Probe Station

200mm Probe Station

200 mm Wafer Prober

200mm Wafer Probing

200mm Wafer Probe

200mm Wafer Probe Systems

200mm Manual Probe Station

EMI Shielded Probing System

200mm EMI/RFI Shielded Probe Station

MPI TS200-SE Probe System

MPI TS200-SE - 200 mm Manual Probe System with ShielDEnvironment™

The MPI TS200-ShielDEnvironment™ (TS200-SE) is designed to ensure advanced EMI/RFI/light-tight shielding, ultra-low noise, low leakage measurement capabilities in a temperature range from -60 to +300°C.

Features & Benefits

ShielDEnvironment™

MPI ShielDEnvironment™ is a high performance local environmental chamber providing excellent EMI- and light-tight shielded test environment for ultra-low noise, low capacitance measurements.

MPI ShielDEnvironment™

ShielDCap™

A fully configurable part of the MPI ShielDEnvironment™ which allows up to 4-port RF or up to 8-ports DC/Kelvin or a combination of those configurations.

Easy to reconfigure with convenient shielding that is MPI ShielDCap™ – a lot of little things which make the difference in simplifying day by day operations.

The complete ShielDCap™ is easily replaceable with the EMI-Shielded version of a probe card holder.

MPI ShielDCap™

Air-Bearing Stage

The MPI unique air-bearing stage design, with simple single-handed puck control, provides unsurpassed convenience of operation for fast XY navigation and quick wafer loading without compromising accurate and fine positioning capability with the additional fine and accurate 25x25mm XY-Theta micrometer movement.

MPI TS200-SE - Air Bearing Stage

Unique Platen Lift with Probe Hover Control™

The repeatable (1 μm) platen lift design has three discrete positions for contact, separation (300 μm), and loading (3 mm). The lift includes a safety lock rotation utility which prevents accidental platform descent. These features offer unparalleled functionality and are standard offerings for the MPI TS200-SE manual probe system. Prevention of unexpected probe or wafer damage is critical to system design and provides intuitive control, accurate contact positioning, safe set-ups, and easy step and repeat functionality.

Unique Chuck Z Adjustment

TS200-SE incorporates in addition to the air bearing XY stage – 5 mm Z chuck adjustment in µm resolution for fine and accurate contact / over-travel control or probe cards drop tip correction.

A 1 mm scale indicator provides easy feedback to the operator. 20 mm pneumatic lift in addition offers easy and continent  loading / unloading procedure.

MPI TS200-SE - Chuck Z Control

Various Chuck Options

The TS200-SE is available with various chuck options to meet different budgets and application requirements:

  • Ambient Chucks: Coaxial, Triaxial or RF with two auxiliary chucks built in ceramic material for accurate RF calibration
  • Various ERS AirCool Chucks from -60°C to 300°C
MPI TS200-SE - Chucks

Thermal Control Integration

The wafer loading door is simply locked at any temperatures below 15°C – this unique feature makes TS200-SE the safest manual probe station in the market.

Furthermore, the thermal chuck can be operated by using the fully integrated touchscreen display, placed at convenient location in front of the operator for fast and operation and immediate feedback.

MPI TS200-SE - Integrated Thermal Chuck Controller Panel

ERS Patented AC3 Cooling Technology Incorporated

These chucks incorporate the ERS patented AC3 cooling technology and its air management system to purge the MPI ShielDEnvironment™ directly from “already used” air – reducing dry air consumption up to 30 to 50% as compared to other systems on the market.

ERS Patented AC3 Cooling Technology

Various Optic Options

MPI Optics are available with a choice between a single tube MPI SuperZoom™ SZ10, the MegaZoom™ MZ12 with up to 12x optical zoom and more than 42 mm working distance or EeyZoom™  EZ10 – the 10x optical zoom optic with ergonomic 20x eyepieces, 90 mm working distance and down to 2 µm optical resolving power.

Unique Upgrade Path

The modular design of theTS200-SE modular creates a unique upgrade path. All TS200-SE probing accessories, such as thermal chucks, microscope and positioners, can be upgraded or reconfigured to variety of application requirements covering tool lifespan for increasingly low cost of ownership.

The MPI TS200-SE probe systems with ShielDEnvironment™ provides maximum EMI shielding and allows for low noise device on-wafer measurements for wide verity of applications such as Device Characterization and Modeling, RF/Microwave, Wafer Level Reliability, Failure Analysis, Design Validation, and High Power.

Field Application Engineer

Job Location: San Jose, CA

Job Duties:

  • Assist in developing HW and SW measurement methodologies/solutions for analytical wafer probe solutions with signal applications from DC to millimeter wave frequencies as well as Silicon Photonics (SiPH);
  • Collaborate with customers on their measurement challenges, and provide applications specific product training;
  • Provide pre- and post-sale support to AST, customers, service department, and the sales channel developing HW and SW measurement solutions for analytical wafer probe stations;
  • Define application-specific solutions based on customer-provided device data and facilitate both customer and divisional teams to successful results;
  • Perform product training seminars for customer and sales channels as well as participate in trade shows and technical seminars;
  • Make recommendations regarding product improvement, new products, and quality enhancement;
  • Author, document, publish, and present measurement solutions via Seminars, Applications Notes, Briefs, and White Papers;
  • Prepare, plan, and assist with customer product demonstrations that highlight value-based differentiation of AST product offerings;
  • Develop unique and individual customer presentations designed to professionally position the MPI brand in the North American market and deliver formal presentations to customers.

Job Requirements:

Master’s degree in Electrical Eng., Electronics Eng., Physics, or Photonics; Must possess 6 months of relevant work experience; Travel to customers’ sites in US and headquarters in Taiwan is required.

Send resume to: MPI America, Inc., 2360 Qume Drive, Suite C, San Jose, CA 95131, Attn: Janet Chiang