Manual THZ Probe System

150mm THZ Probe Station

Wafer Prober

150mm Probe Station

150mm Manual Probe Station

150 mm Wafer Prober

150mm Wafer Probing Manufacturers

Wafer Probe Testing

150mm Manual Probe Systems

150mm Manual Probe Station

150 mm Wafer Probing Station

150mm Wafer Probing

MPI TS150-THZ Probe System

With significant expansion of emerging THz applications, such as high-speed 5G communication, satellites, non-invasive spectroscopy, security and surveillance, medical and health care equipment, and short range automotive radar, the need for accurate, reliable and repeatable measurement data has become more crucial than ever. This is especially true for the research and technology development of the devices, integrated circuits and new product building blocks serving the need of these THz applications.

The MPI TS150-THZ is the first, worldwide 150 mm dedicated probe station designed explicitly for mmW and THz on-wafer measurements up to 1.5 THz and beyond. It provides unsurpassed features:

  • Seamless integration of any banded, differential or broadband frequency extenders up to 1.5 THz
  • Maximum on mechanical stability and repeatability combined with convenient and safety operation
  • Minimizing the measurement path for best possible measurement directivity

Features & Benefits

Air-Bearing Stage

The MPI unique air-bearing stage design, with simple single-handed puck control, provides unsurpassed convenience of operation for fast XY navigation and quick wafer loading without compromising accurate and fine positioning capability with the additional fine and accurate 25×25 mm XY-Theta micrometer movement.

MPI TS150-THZ - Air Bearing Stage with Optional Fine-Adjustment Micrometers

First-to-market 3-Port Capability

Ready for the D-Band and 6G technology with RF/LO frequency coverage to 170 GHz and beyond.

As first on the market, MPI’s TS150-THZ enables, 3-port mmW characterization of e.g., broadband sub-harmonic mixer by testing of two-sided coupling energy of mmW and local oscillation (LO) signals simultaneously.

MPI offers an easy upgrade path for the existing TS150-THZ systems as well.

MPI TS150-THZ - First-to-market 3-Port Capability

Unique Platen Lift
with Probe Hover Control™

The highly repeatable (1 µm) platen lift design with three discrete positions for contact, separation (300 µm), and loading (3 mm) with a safety lock utility are all examples of unparalleled functionality incorporated into MPI TS150-THZ manual probe system. These features prevent unexpected probe or wafer damage while providing intuitive control, accurate contact positioning, and safety set-up. This capability is especially critical if probes in mmW and sub-THz range are so cost intensive.

Additional Probe Hover Control™ comes with hover heights (50, 100 or 150 µm) for easy and convenient probe to pad alignment

Chuck Z Adjustment

TS150-THZ has 10mm fine chuck Z adjustment, designed to be flexible in the integration of different frequency extenders, like from Rohde & Schwarz, VDI or OML. Extremely beneficial for set-ups using several bended solutions on the same probe system – for easy and fast reset-up.

MPI TS150-THZ - Standard Fine Z Adjustment and Optional XY-Theta Micrometer Movements

Multiple Configurations of MicroPositioners

The dedicated and extremely rigid probe platen design accommodates two bolt-down MP80 large area MicroPositioners in east-west configuration. Four port RF measurements or DC biasing is easy possible by having two North and South “bridges” as a standard configuration.

MPI TS150-THZ - North and South Platen Bridges

MP80-DX

Another MPI pioneering solution on the market – the unique MP80-DX with easy and precise definition down to 1µm of Δl – is the ideal choice for accurate and cost-effective multiline TRL – the only RF calibration method in the mmW and sub-THz range. For more details, visit MPI QAlibria® software.

MPI MP80-DX - Large Area Postioner with Digital Gadget

Various Chuck Options

The TS150-THZ is available with various chuck options to meet different budgets and application requirements such as MPI’s:

  • Standard RF Chuck with BNC connector,
  • Dedicated mmW Chuck, completely build in special ceramic with high thermal conductivity (>180W/Km), or even
  • ERS AirCool RF Chuck (from 20°C to 200°C, or higher) with integrated Gold plated top surface with small vacuum holes

All chucks having two auxiliary chucks built in ceramic material for accurate RF calibration, especially in the range above 40GHz.

Various Optic Options

A dedicated MPI Optics are available with a choice between a single tube MPI SuperZoom SZ10 or the MegaZoom MZ12 with up to 12x optical zoom and more than 45 mm working distance. The small factor of such microscopes is ideal for RF and mmW applications due to space restrictions inherent with the integration of frequency extenders requiring shortest distance to DUT.

Field Application Engineer

Job Location: San Jose, CA

Job Duties:

  • Assist in developing HW and SW measurement methodologies/solutions for analytical wafer probe solutions with signal applications from DC to millimeter wave frequencies as well as Silicon Photonics (SiPH);
  • Collaborate with customers on their measurement challenges, and provide applications specific product training;
  • Provide pre- and post-sale support to AST, customers, service department, and the sales channel developing HW and SW measurement solutions for analytical wafer probe stations;
  • Define application-specific solutions based on customer-provided device data and facilitate both customer and divisional teams to successful results;
  • Perform product training seminars for customer and sales channels as well as participate in trade shows and technical seminars;
  • Make recommendations regarding product improvement, new products, and quality enhancement;
  • Author, document, publish, and present measurement solutions via Seminars, Applications Notes, Briefs, and White Papers;
  • Prepare, plan, and assist with customer product demonstrations that highlight value-based differentiation of AST product offerings;
  • Develop unique and individual customer presentations designed to professionally position the MPI brand in the North American market and deliver formal presentations to customers.

Job Requirements:

Master’s degree in Electrical Eng., Electronics Eng., Physics, or Photonics; Must possess 6 months of relevant work experience; Travel to customers’ sites in US and headquarters in Taiwan is required.

Send resume to: MPI America, Inc., 2360 Qume Drive, Suite C, San Jose, CA 95131, Attn: Janet Chiang