Automated Visual Inspection System

AS800 Series

2d可見光光源
ir光光源
uv光光源
Visible Light Inspection

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|AS800 Series

Automated
Visual
Inspection
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|AS800 Series

Automated
Visual
Inspection
System

UV Light Inspection

Home > MPI PA > Products > Inspection Solutions

|AS800 Series

Automated
Visual
Inspection
System

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AS800 Overview

Advanced 2D Automated Visual Inspection

 

The AS800 is a cutting-edge 2D automated visual inspection (AVI) system engineered for high-precision and efficient defect detection in wafer manufacturing. Designed with modular architecture, adaptable lighting configurations, and AI-Driven recognition, it ensures superior quality control throughout the production process.

From wafer surface defect inspection and internal crack analysis to high-precision specialized applications, the AS800 delivers reliable, high-performance solutions that optimize yield and strengthen your competitive advantage.

View Fact Sheet

Key Features

Change Kit

Adaptive Change Kit

Swiftly adapts to different wafer carrier sizes and shapes for seamless process integration.

多倍率光學系統

Versatile Optical System

Turret-style optics enable automatic switching between 2.5x, 5x, and 10x magnifications for precise inspection.

Docking Loader

High-Efficiency Docking Loader

Dual AVI stations ensure fast loading, unloading, and smooth multi-machine connectivity.

彈性選配模組

Modular Inspection Flexibility

Customizable 2D vision and contour inspection modules provide multi-functional capabilities.

Solutions

Solving Your Most Critical Inspection Challenge

Consistent Quality Assurance

The AS800 is engineered to eliminate inconsistencies in quality control by combining high-precision imaging with a flexible lighting system. Designed for a wide range of materials and structures, it reduces false positives and undetected defects, ensuring superior product reliability.

Maximizing Production Efficiency

By integrating intelligent automation and real-time defect classification, the AS800 significantly reduces inspection time and manual intervention. Its dual-sided simultaneous inspection further accelerates throughput and optimizes operational efficiency.

Lowering Operation Cost

With AI-powered defect recognition and automated verification, the AS800 reduces manual re-inspections while improving overall detection accuracy. It consolidates inspection data into a single, standardized report, reducing human intervention and error rates.

晶圓翹曲Wafer Warpage
Supports

± 3 mm

雙面檢測Dual-Sided Inspection
Efficiency

50 %

AI 驅動檢測AI Driven Inspection
Accuracy

99 %

Applications

Defect Inspection

2D Inspection

High-precision front and back inspection.

Detects pad defects, peeling, chipping, and epitaxial defects.

3D Inspection

Comprehensive 3D measurement and surface profiling.

Optimized for complex structures, improving depth and accuracy.

Lighting Applications

Visible Light Inspection

Precisely detects surface structures.

Supports pad scratch detection, emission area defects, and other surface irregularities.

IR Light Inspection

High-penetration infrared for subsurface crack detection.

Enables non-destructive internal defect analysis with minimal thermal impact.

UV Light Inspection

Specialized for micro-crack detection, capturing fine surface defects.

Ensures structural integrity in Micro LED applications, enhancing stability and reliability.

Material Applications

Si (Silicon)

Essential for defect inspection in IC, MEMS, sensor, and memory manufacturing, ensuring high precision and reliability.

GaAs (Gallium Arsenide)

Widely used in optical communications (PD, VCSEL), LED, and RF applications, providing precise inspection to enhance component quality.

GaN (Gallium Nitride)

Optimized for high-frequency and high-power electronics, delivering accurate performance assessment of power amplifiers to ensure reliability and efficiency.

EEL (Edge-Emitting Laser)

Designed for optical communications (PD, VCSEL), industrial lasers, and medical devices, offering

mobile
Defect Inspection

2D Inspection

High-precision front and back inspection.

Detects pad defects, peeling, chipping, and epitaxial defects.

3D Inspection

Comprehensive 3D measurement and surface profiling.

Optimized for complex structures, improving depth and accuracy.

Lighting Applications

Visible Light Inspection

Precisely detects surface structures.

Supports pad scratch detection, emission area defects, and other surface irregularities.

IR Light Inspection

High-penetration infrared for subsurface crack detection.

Enables non-destructive internal defect analysis with minimal thermal impact.

UV Light Inspection

Specialized for micro-crack detection, capturing fine surface defects.

Ensures structural integrity in Micro LED applications, enhancing stability and reliability.

Material Applications

Si (Silicon)

Essential for defect inspection in IC, MEMS, sensor, and memory manufacturing, ensuring high precision and reliability.

GaAs (Gallium Arsenide)

Widely used in optical communications (PD, VCSEL), LED, and RF applications, providing precise inspection to enhance component quality.

GaN (Gallium Nitride)

Optimized for high-frequency and high-power electronics, delivering accurate performance assessment of power amplifiers to ensure reliability and efficiency.

EEL (Edge-Emitting Laser)

Designed for optical communications (PD, VCSEL), industrial lasers, and medical devices, offering high-precision inspection to maintain component integrity and stability.

Technical Specs

AS800

Model Name

AS800

Inspection camera

25MP, 31MP  MonoColor

Magnification / Resolution

2.5x 1.38µm/pixel

 5x  0.69µm/pixel

 10x 0.345µm/pixel

Max. Wafer Handling Size

8”

Distributed Computing Units

Standard: 2 units
Optional: up to 6 units

Vibration control standards

VC-D level

Dual-Sided Inspection

Color Variation Defect Detection

Quick Carrier Exchange

Wafer Warpage Compensation

Model Name

AS800

Inspection camera

25MP, 31MP  MonoColor

Magnification / Resolution

2.5x 1.38µm/pixel

 5x  0.69µm/pixel

 10x 0.345µm/pixel

Max. Wafer Handling Size

8”

Distributed Computing Units

Standard: 2 units
Optional: up to 6 units

Vibration control standards

VC-D level

Dual-Sided Inspection

Color Variation Defect Detection

Quick Carrier Exchange

Wafer Warpage Compensation

Features Demo

Dual-Sided Synchronous Inspection

Enables simultaneous front / back side defect detection, improving inspection efficiency and accuracy while ensuring consistent and precise results.

View Video 

 

Automatic Magnification Switching

Demonstrates the turret system’s ability to automatically switch magnification levels, allowing for more efficient and streamlined inspection transitions.

View Video 

 

Resources

Fact Sheet

Quickly understand the highlights of the AS800 product

 

Data Sheet

View the detailed specifications of the AS800

 

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